The influence of selective sputtering on surface composition
The time dependence of the surface composition of a one-phase, two-component homogeneous system is calculated assuming different sputter yields for the two components. It is shown for a special case that the amount of material which has to be removed before a steady state situation is obtained, is a...
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| Veröffentlicht in: | Surface science 1976-07, Vol.57 (2), p.706-714 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | The time dependence of the surface composition of a one-phase, two-component homogeneous system is calculated assuming different sputter yields for the two components. It is shown for a special case that the amount of material which has to be removed before a steady state situation is obtained, is approximately one monolayer. Signals obtainable with different modern surface analytical methods under steady state conditions are discussed. |
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| ISSN: | 0039-6028 1879-2758 |
| DOI: | 10.1016/0039-6028(76)90356-3 |