Low-index-mode photonic crystal nanobeam cavity for refractive index sensing at the 2 μm wavelength band
We present the design, fabrication, and characterization of a one-dimensional photonic crystal (1D-PhC) low-index-mode nanobeam cavity on the silicon-on-insulator platform for refractive index sensing at the 2 μm wavelength band. A Q-factor of 4.35×10 and an effective mode volume of V ∼1.95(λ/n ) ar...
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Veröffentlicht in: | Applied optics (2004) 2019-04, Vol.58 (12), p.3059-3063 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We present the design, fabrication, and characterization of a one-dimensional photonic crystal (1D-PhC) low-index-mode nanobeam cavity on the silicon-on-insulator platform for refractive index sensing at the 2 μm wavelength band. A Q-factor of 4.35×10
and an effective mode volume of V
∼1.95(λ/n
)
are theoretically achieved. The measured transmission spectrum of the device immersed in NaCl solutions with different mass concentrations demonstrates a sensitivity of 326.1 nm/RIU and a Q-factor of ∼1144. |
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ISSN: | 1559-128X 2155-3165 1539-4522 |
DOI: | 10.1364/AO.58.003059 |