Method for the determination of the thermophysical properties of evaporated thin films
A method for detailed investigation of the thermophysical properties of thin films after removal from their substrates is proposed. The thermal conductivity coefficient λ, the coefficient of total emissivity ε and the resistivity ϱ of Al and Ag polycrystalline evaporated films 500–1000 Å thick have...
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Veröffentlicht in: | Thin solid films 1973-08, Vol.17 (2), p.157-161 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | A method for detailed investigation of the thermophysical properties of thin films after removal from their substrates is proposed. The thermal conductivity coefficient λ, the coefficient of total emissivity ε and the resistivity ϱ of Al and Ag polycrystalline evaporated films 500–1000 Å thick have been determined in the temperature range 300–900 K. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(73)90124-7 |