Method for the determination of the thermophysical properties of evaporated thin films

A method for detailed investigation of the thermophysical properties of thin films after removal from their substrates is proposed. The thermal conductivity coefficient λ, the coefficient of total emissivity ε and the resistivity ϱ of Al and Ag polycrystalline evaporated films 500–1000 Å thick have...

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Veröffentlicht in:Thin solid films 1973-08, Vol.17 (2), p.157-161
Hauptverfasser: Boiko, B.T., Pugachev, A.T., Bratsychin, V.M.
Format: Artikel
Sprache:eng
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Zusammenfassung:A method for detailed investigation of the thermophysical properties of thin films after removal from their substrates is proposed. The thermal conductivity coefficient λ, the coefficient of total emissivity ε and the resistivity ϱ of Al and Ag polycrystalline evaporated films 500–1000 Å thick have been determined in the temperature range 300–900 K.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(73)90124-7