A new route for fabricating polymer optical microcavities

A new route for fabricating polymer optical microcavities

By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (σ < 0.6 nm) and high-Q factors (∼104) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (...

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Veröffentlicht in:Nanoscale 2019-03, Vol.11 (12), p.5203-5208
Hauptverfasser: Zhang, Zhang, Yao, Ni, Pan, Jing, Zhang, Lei, Fang, Wei, Tong, Limin
Format: Artikel
Sprache:eng
Schlagworte:
Microcavities
Microlasers
Polydimethylsiloxane
Q factors
Self-assembly
Temperature sensors
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Zusammenfassung:By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (σ < 0.6 nm) and high-Q factors (∼104) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (120 pm per °C) and long-term stability (over one year). These results illustrate broad application potential in ultrasensitive sensors and microlasers.
ISSN:2040-3364
2040-3372
DOI:10.1039/c8nr10007a