Mid-Infrared Chalcogenide Waveguides for Real-Time and Nondestructive Volatile Organic Compound Detection

A mid-infrared (mid-IR) sensor chip was demonstrated for volatile organic compound (VOC) detection. The sensor consisted of As2Se3 optical waveguides built by microelectronic fabrication processes. The VOC sensing performance was characterized by measuring acetone and ethanol vapors at their charact...

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Veröffentlicht in:	Analytical chemistry (Washington) 2019-01, Vol.91 (1), p.817-822
Hauptverfasser:	Jin, Tiening, Zhou, Junchao, Lin, Hao-Yu Greg, Lin, Pao Tai
Format:	Artikel
Sprache:	eng
Schlagworte:	Acetone Arsenic triselenide Chemistry Environmental monitoring Ethanol Fabrication Infrared detectors Infrared radiation Microelectronics Nondestructive testing Optical waveguides Organic chemicals Organic compounds Response time Toxins Vapors VOCs Volatile organic compounds Wave attenuation
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Beschreibung
Zusammenfassung:	A mid-infrared (mid-IR) sensor chip was demonstrated for volatile organic compound (VOC) detection. The sensor consisted of As2Se3 optical waveguides built by microelectronic fabrication processes. The VOC sensing performance was characterized by measuring acetone and ethanol vapors at their characteristic C–H absorption from λ = 3.40 to 3.50 μm. Continuous VOC detection with
ISSN:	0003-2700 1520-6882
DOI:	10.1021/acs.analchem.8b03004