Vacuum furnace for degassing stainless-steel vacuum components

Ultrahigh vacuum systems must often be constructed of materials with ultralow outgassing rates to achieve pressure of 10−6 Pa and below. Any component placed into the ultrahigh vacuum system must also be constructed of materials with ultralow outgassing rates. Baking stainless steel vacuum component...

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Veröffentlicht in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2018-03, Vol.36 (2)
Hauptverfasser: Fedchak, James A., Scherschligt, Julia, Barker, Daniel, Eckel, Stephen, Farrell, Alex P., Sefa, Makfir
Format: Artikel
Sprache:eng
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Zusammenfassung:Ultrahigh vacuum systems must often be constructed of materials with ultralow outgassing rates to achieve pressure of 10−6 Pa and below. Any component placed into the ultrahigh vacuum system must also be constructed of materials with ultralow outgassing rates. Baking stainless steel vacuum components to a temperature range of 400–450 °C while under vacuum is an effective method to reduce the outgassing rate of vacuum components for use in ultrahigh vacuum systems. The design, construction, and operation of a vacuum furnace capable of baking vacuum components to a temperature of 450 °C while maintaining a pressure of 10−3 Pa or lower is described. The furnace has been used for extended bakes at 450 °C while maintaining pressures below 10−5 Pa. As an example, the authors obtained an outgassing rate of 1.2 × 10−9 Pa l s−1 for a gate valve baked for 20 days at a temperature of 420 °C.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.5016181