Subsurface metrology using scanning white light interferometry: absolute z coordinates deep inside displays

Mobile devices with interactive displays are ubiquitous commodities. Efficient quality control (QC) drives competitiveness. Scanning white light interferometry imaging offers a fast and nondestructive tool for QC purposes. Relying on optical compensation and image stitching, one can rapidly and cost-effectively produce sharp 3D images of a display's inner structures with a few nanometers' accuracy along the z direction. As a practical example, 3D images of a mobile device display revealed 0.92±0.02 μm height variation in the top glass assembly. The proposed method improves quality assurance methods of display manufacturing.