Performance and Reliability of Electrowetting-on-Dielectric (EWOD) Systems Based on Tantalum Oxide

The electrowetting-on-dielectric behavior of Cytop/Tantalum oxide (TaOx) bilayers is studied by measuring their response vs applied voltage and under prolonged periodic cycling, below and above the threshold voltage V T corresponding to the breakdown field for the oxide. TaOx exhibits symmetric soli...

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Veröffentlicht in:ACS applied materials & interfaces 2017-12, Vol.9 (48), p.42278-42286
Hauptverfasser: Mibus, Marcel, Zangari, Giovanni
Format: Artikel
Sprache:eng
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Zusammenfassung:The electrowetting-on-dielectric behavior of Cytop/Tantalum oxide (TaOx) bilayers is studied by measuring their response vs applied voltage and under prolonged periodic cycling, below and above the threshold voltage V T corresponding to the breakdown field for the oxide. TaOx exhibits symmetric solid state I–V characteristics, with electronic conduction dominated by Schottky, Poole–Frenkel emission; conduction is attributed to oxygen vacancies (6 × 1016 cm–3), resulting in large currents at low bias. Electrolyte/Metal Oxide/Metal I–V characteristics show oxide degradation at (
ISSN:1944-8244
1944-8252
DOI:10.1021/acsami.7b07366