Heterogeneous integration of lithium niobate and siliconnitride waveguides for wafer-scale photonic integrated circuits onsilicon

An ideal photonic integrated circuit for nonlinear photonic applications requires high optical nonlinearities and low loss. This work demonstrates a heterogeneous platform by bonding lithium niobate (LN) thin films onto a silicon nitride (Si sub(3) N sub(4)) waveguide layer on silicon. It not only provides large second- and third-order nonlinear coefficients, but also shows low propagation loss in both the Si sub(3) N sub(4) and the LN-Si sub(3) N sub(4) waveguides. The tapers enable low-loss-mode transitions between these two waveguides. This platform is essential for various on-chip applications, e.g., modulators, frequency conversions, and quantum communications.