Deposition of highly c-axis-oriented ScAlN thin films at different sputtering power

Highly c-axis-oriented (002) of Sc x Al 1−x N thin films with high Sc concentration (x) have drawn a significant attention in the bulk acoustic wave (BAW) and surface acoustic wave (SAW) resonators because of their excellent piezoelectric performance. This paper presents the preparation and characte...

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Veröffentlicht in:	Journal of materials science. Materials in electronics 2017-04, Vol.28 (7), p.5512-5517
Hauptverfasser:	Tang, Jialin, Niu, Dongwei, Tai, Zhiwei, Hu, Xianwei
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum nitride Characterization and Evaluation of Materials Chemistry and Materials Science Deposition Materials Science Morphology Optical and Electronic Materials Piezoelectricity Scandium Sputtering Surface acoustic waves Thin films
Online-Zugang:	Volltext
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