Microwave Cooled Microbolometers Based on Cermet Si–Cr Films

We present the results of creating a cooled microbolometer based on the cermet films of the silicon and chromium mixture. This material is used for manufacturing the freely hanging high-resistive microbolometers for the first time. The details of fabricating such microbolometers and the prospects fo...

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Veröffentlicht in:	Radiophysics and quantum electronics 2017, Vol.59 (8-9), p.727-733
Hauptverfasser:	Vdovichev, S. N., Vdovin, V. F., Klimov, A. Yu, Mukhin, A. S., Nozdrin, Yu. N., Rogov, V. V., Udalov, O. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Astronomy Astrophysics and Astroparticles Cermets Chromium Estimates Hadrons Heavy Ions Lasers Mathematical and Computational Physics Microwaves Nuclear Physics Observations and Techniques Optical Devices Optics Photonics Physics Physics and Astronomy Quantum electronics Quantum Optics Sensitivity Silicon Theoretical
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Beschreibung
Zusammenfassung:	We present the results of creating a cooled microbolometer based on the cermet films of the silicon and chromium mixture. This material is used for manufacturing the freely hanging high-resistive microbolometers for the first time. The details of fabricating such microbolometers and the prospects for using cermet films to construct microbolometers are discussed. The first estimates of sensitivity of the fabricated microbolometers are given.
ISSN:	0033-8443 1573-9120
DOI:	10.1007/s11141-017-9741-y