General spatial phase-shifting interferometry by optimizing the signal retrieving function

A general spatial phase-shifting (GSPS) interferometry method is proposed to achieve phase retrieval from one-frame spatial carrier frequency interferogram. By optimizing the internal signal retrieving function of the spatial phase-shifting (SPS) method, the accuracy, anti-noise ability and speed of...

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Veröffentlicht in:Optics express 2017-04, Vol.25 (7), p.7170-7180
Hauptverfasser: Wang, Yi, Qiu, Xiang, Xiong, Jiaxiang, Li, Bingbo, Zhong, Liyun, Liu, Shengde, Zhou, Yunfei, Tian, Jindong, Lu, Xiaoxu
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Sprache:eng
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Zusammenfassung:A general spatial phase-shifting (GSPS) interferometry method is proposed to achieve phase retrieval from one-frame spatial carrier frequency interferogram. By optimizing the internal signal retrieving function of the spatial phase-shifting (SPS) method, the accuracy, anti-noise ability and speed of phase retrieval can be significantly improved, meanwhile the corresponding local calculation property is reserved. Especially, in the case that the ratio of the spatial carrier to the phase variation rate are small, the proposed method reveals obvious advantage in the accuracy improvement relative to the conventional SPS methods, so the more details of measured sample can be effectively reserved through introducing smaller spatial carrier frequency, and this will facilitate its application in interference microscopy. The principle analysis, numerical simulation and experimental result are employed to verify the performance of the proposed GSPS method.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.25.007170