Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm

Results from the development of an experimental sample of a measure with relief elements less than 100 nm for use in calibration of optical, near-field, and electron microscopes based on a metallized electronic resist (coating) are presented.

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Bibliographische Detailangaben
Veröffentlicht in:	Measurement techniques 2016-02, Vol.58 (11), p.1214-1215
Hauptverfasser:	Efimenkov, Yu. R., Zolotarevskii, Yu. M., Lyaskovskii, V. L., Min’kov, K. N., Samoilenko, A. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical Chemistry Automation Calibration Characterization and Evaluation of Materials Coating Electron microscopes Electronics Interferometry Inverse problems Manufactured products Measurement Measurement Science and Instrumentation Measurement techniques Metallizing Microscopes Microscopy Nanostructured materials Physical Chemistry Physics Physics and Astronomy Radiation Resists Silicon Studies
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Beschreibung
Zusammenfassung:	Results from the development of an experimental sample of a measure with relief elements less than 100 nm for use in calibration of optical, near-field, and electron microscopes based on a metallized electronic resist (coating) are presented.
ISSN:	0543-1972 1573-8906
DOI:	10.1007/s11018-016-0872-x