Polycrystalline VO sub(2) thin films via femtosecond laser processing of amorphous VO sub()

Femtosecond laser processing of pulsed laser-deposited amorphous vanadium oxide thin films was investigated. Polycrystalline VO sub(2) thin films were achieved by femtosecond laser processing in air at room temperature. The electrical transport properties, crystal structure, surface morphology, and optical properties were characterized. The laser-processed films exhibited a metal-insulator phase transition characteristic of VO sub(2), thus presenting a pathway for the growth of crystalline vanadium dioxide films on low-temperature substrates.