The implementation of low‐power and wide tuning range MEMS filters for communication applications

Theory and optimization were studied in detail to find optimum dimensions of fixed‐fixed beam for the sake of low‐power and wide‐range frequency tuning applications. This optimization also provides a method to avoid device failure due to high thermal stress. The good agreement between theory, simula...

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Veröffentlicht in:	Radio science 2016-10, Vol.51 (10), p.1636-1644
Hauptverfasser:	Göktaş, H., Zaghloul, M. E.
Format:	Artikel
Sprache:	eng
Schlagworte:	CMOS‐MEMS Communications equipment Dielectrics Electric potential Electrical engineering embedded heater frequency tuning Optimization Power consumption Resonators Simulation Tuning Voltage
Online-Zugang:	Volltext
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