The implementation of low‐power and wide tuning range MEMS filters for communication applications

Theory and optimization were studied in detail to find optimum dimensions of fixed‐fixed beam for the sake of low‐power and wide‐range frequency tuning applications. This optimization also provides a method to avoid device failure due to high thermal stress. The good agreement between theory, simulation, and measurement is achieved and can serve as a guidance for future works. Two resonators, consisting of multiple metal, dielectric, and polysilicon layers, were designed; the first resonator at 303.4 kHz and the second at 2053 kHz achieve the frequency tuning ranges of 35.7%–42.6%, respectively. A power consumption of 900 μW/beam is achieved for the first design of 152 µm length beam while providing a frequency tuning of 35.7%. Further increase in the tuning capability was achieved by the increase in the applied DC bias voltage between adjacent beams. Key Points CMOS‐MEMS resonators for communication applications Low‐power, wide‐range active frequency tuning