Investigation of Uncertainty Sources of Piezoresistive Silicon Based Stress Sensor
The aim of this paper is to get insight into measurement uncertainties for thermomechanical measurements performed using a piezoresistive silicon-based stress sensor in a standard microelectronic package. All used sensors have the same construction, were produced in the same technological processes...
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| Veröffentlicht in: | Applied Mechanics and Materials 2015-11, Vol.807 (Uncertainty in Mechanical Engineering II), p.45-54 |
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| container_issue | Uncertainty in Mechanical Engineering II |
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| container_title | Applied Mechanics and Materials |
| container_volume | 807 |
| creator | Schindler-Saefkow, Florian Gromala, Przemyslaw Kreyßig, Kerstin Palczynska, Alicja Mayer, Dirk Rzepka, Sven Melz, Tobias |
| description | The aim of this paper is to get insight into measurement uncertainties for thermomechanical measurements performed using a piezoresistive silicon-based stress sensor in a standard microelectronic package. All used sensors have the same construction, were produced in the same technological processes at the same time, yet the measurement results show significant distribution. The possible causes for this phenomenon are discussed in this paper. Additionally, Finite Element Method (FEM) model is created and validated, what enables a study of sensitive parameters influencing the measurement uncertainties. |
| doi_str_mv | 10.4028/www.scientific.net/AMM.807.45 |
| format | Article |
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| subjects | Finite element method Investigations Mathematical analysis Mathematical models Mechanical engineering Parameter sensitivity Parameter uncertainty Sensors Shear stress Silicon Standard deviation Statistical analysis Stresses Thermal cycling Time measurement Transistors Uncertainty |
| title | Investigation of Uncertainty Sources of Piezoresistive Silicon Based Stress Sensor |
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