Development of Miniature Electromagnetic Devices Combined with Silicon and Magnetic Ceramic

As portable devices become smaller and more convenient, they increasingly require miniaturized batteries that preserve the light weight of the device while delivering sufficient power. However, miniaturization of conventional magnetic devices is precluded by the magnetic material and helical structure of the coil. To solve this problem, we introduce a multilayer ceramic technology that realizes three-dimensional miniature magnetic devices. The miniature components are fabricated by micro-electro-mechanical systems (MEMS) technology. This paper describes an electromagnetic motor and an electromagnetic induction type air turbine generator developed through MEMS and multilayer ceramic technologies. The fabricated motor is 4.2 [mm] in diameter and 6.0 [mm] in height, runs at 1080 rpm, and has a consumption power of 0.11 [W]. The air turbine generator is 10.6 [mm] long, 10.6 [mm] wide, and 3.6 [mm] high. Connected to a 4 [Ω] load resistor, its output power is 195 [μVA] at a rotational speed of 9000 rpm.