Microwave sputtering of conductors and insulators for optical emission and mass spectrometry

A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The...

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Veröffentlicht in:	Analytical and bioanalytical chemistry 1996-07, Vol.355 (7-8), p.820-825
Hauptverfasser:	RÜMMELI, M. H, OUTRED, M, SPILLANE, D. E. M, STEERS, E. B. M
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemistry Exact sciences and technology Spectrometric and optical methods
Online-Zugang:	Volltext
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