Microwave sputtering of conductors and insulators for optical emission and mass spectrometry

Microwave sputtering of conductors and insulators for optical emission and mass spectrometry

A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The...

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Veröffentlicht in:Analytical and bioanalytical chemistry 1996-07, Vol.355 (7-8), p.820-825
Hauptverfasser: RÜMMELI, M. H, OUTRED, M, SPILLANE, D. E. M, STEERS, E. B. M
Format: Artikel
Sprache:eng
Schlagworte:
Analytical chemistry
Chemistry
Exact sciences and technology
Spectrometric and optical methods
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Zusammenfassung:A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The dependence of the signals on gas pressure and net microwave power was investigated.
ISSN:0937-0633
1618-2642
1432-1130
1618-2650
DOI:10.1007/s0021663550820