Role of Surface Chemistry in Semiconductor Thin Film Processing
Ekerdt et al discuss the role of surface chemistry in semiconductor thin film processing. Surface chemistry studies are providing important information that can be used to evaluate the technological potential of nonthermal activation processes.
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| Veröffentlicht in: | Chemical reviews 1996-06, Vol.96 (4), p.1499-1518 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Ekerdt et al discuss the role of surface chemistry in semiconductor thin film processing. Surface chemistry studies are providing important information that can be used to evaluate the technological potential of nonthermal activation processes. |
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| ISSN: | 0009-2665 1520-6890 |
| DOI: | 10.1021/cr950236z |