Energy filtering transmission electron microscopy using the new JEM‐2010FEF

The new JEM‐2010FEF electron microscope provides useful techniques based on energy filtering as an omega‐type energy filter is integrated into a thermal field‐emission 200 kV transmission electron microscope. For example, the zero‐loss imaging improves the contrast of high resolution lattice images as well as images of precipitates or lattice defects in alloys. The acquisition time for elemental mapping with core‐loss electrons is one order in magnitude shorter than with energy‐dispersive X‐ray spectroscopy. The removal of inelastically scattered electrons enables us to observe weak lines in convergent‐beam electron diffraction patterns from a thicker specimen with a probe size 1–2 nm in diameter. A combination of the field emission gun and sensitive recording media such as an imaging plate and a slow‐scan CCD camera makes the energy filtering more powerful.