Solid-phase crystallization kinetics in doped a-Si chemical-vapor-deposition films

Solid-phase crystallization kinetics in doped a-Si chemical-vapor-deposition films

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Veröffentlicht in:Physical review. B, Condensed matter Condensed matter, 1985-03, Vol.31 (6), p.3568-3575
Hauptverfasser: BISARO, R, MAGARINO, J, ZELLAMA, K, SQUELARD, S, GERMAIN, P
Format: Artikel
Sprache:eng
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Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Physics
Specific phase transitions
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container_end_page 3575
container_issue 6
container_start_page 3568
container_title Physical review. B, Condensed matter
container_volume 31
creator BISARO, R
MAGARINO, J
ZELLAMA, K
SQUELARD, S
GERMAIN, P
description
doi_str_mv 10.1103/PhysRevB.31.3568
format Article
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1095-3795
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source American Physical Society Journals
subjects Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Physics
Specific phase transitions
title Solid-phase crystallization kinetics in doped a-Si chemical-vapor-deposition films
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