Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition
ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator.
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| Veröffentlicht in: | Applied solar energy 2016-04, Vol.52 (2), p.118-121 |
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| container_end_page | 121 |
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| container_issue | 2 |
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| container_title | Applied solar energy |
| container_volume | 52 |
| creator | Atabaev, I. G. Hajiev, M. U. Pak, V. A. Zakirova, S. B. Juraev, Kh. N. |
| description | ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator. |
| doi_str_mv | 10.3103/S0003701X16020079 |
| format | Article |
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| ispartof | Applied solar energy, 2016-04, Vol.52 (2), p.118-121 |
| issn | 0003-701X 1934-9424 |
| language | eng |
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| source | Springer Nature - Complete Springer Journals |
| subjects | Analysis Chemical vapor deposition Conductivity Decomposition Efficiency Electrical Machines and Networks Engineering Evaporation Fabrication Gas flow Glass Glass substrates Heliotechnical Materials Science Indium Photovoltaic cells Power Electronics Ratios Reagents Resistivity Silicon Solar cells Solar energy Studies Temperature Tin Tin oxides |
| title | Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition |
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