Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition

Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition

ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator.

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Bibliographische Detailangaben
Veröffentlicht in:Applied solar energy 2016-04, Vol.52 (2), p.118-121
Hauptverfasser: Atabaev, I. G., Hajiev, M. U., Pak, V. A., Zakirova, S. B., Juraev, Kh. N.
Format: Artikel
Sprache:eng
Schlagworte:
Analysis
Chemical vapor deposition
Conductivity
Decomposition
Efficiency
Electrical Machines and Networks
Engineering
Evaporation
Fabrication
Gas flow
Glass
Glass substrates
Heliotechnical Materials Science
Indium
Photovoltaic cells
Power Electronics
Ratios
Reagents
Resistivity
Silicon
Solar cells
Solar energy
Studies
Temperature
Tin
Tin oxides
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Beschreibung
Zusammenfassung:ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator.
ISSN:0003-701X
1934-9424
DOI:10.3103/S0003701X16020079