Asymmetrical optical microcavity structures for dynamic pressure sensing: design, fabrication, validation

Optical microcavity (OMC) structures have spectral properties that are directly related to their physical dimensions and material refractive indices. Their intrinsically fast optical response to mechanically-induced changes in these parameters makes OMCs uniquely suited for dynamic sensing when paired with a suitably fast streak camera and spectrograph. Various designs and processes of fabrication for asymmetrical OMC (AOMC) structures were investigated to optimize and assess their feasibility for dynamic sensing. Structural and material effects were studied in terms of spectral properties, structure stabilities and fabrication process. From this study, it was shown that an AOMC structure with a SiO cavity layer and Ag mirror layers, fabricated with thin adhesion Al O layers exhibited the best structural stability and spectral properties. Under dynamic compressive loading of ~4 GPa, the structure exhibited a blueshift of 22 nm and a temporal response time of < 3.3 ns, thus demonstrating the potential of AOMC based dynamic pressure sensing.