Development of Flexible Film Mold for Nanoimprinting Process

Development of Flexible Film Mold for Nanoimprinting Process

We developed replica film mold made of specific resin. Durability and transfer properties against transcription material of both the film mold and common PDMS were evaluated. Furthermore, to extend applications of film mold, micro-nano mixed structure was fabricated in film mold as we reported [3]....

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Veröffentlicht in:Journal of Photopolymer Science and Technology 2016/06/21, Vol.29(1), pp.53-54
Hauptverfasser: Suto, Yasuo, Yamanaka, Misato, Urata, Yoshiho, Yamada, Hiroko, Miyazawa, Yukihiro, Mizawa, Takahide
Format: Artikel
Sprache:eng
Schlagworte:
Durability
film mold
Mass production
Molds
nanoimprint
Nanostructure
Photopolymers
Polymers
Resins
roll-to-roll
Silicone resins
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Zusammenfassung:We developed replica film mold made of specific resin. Durability and transfer properties against transcription material of both the film mold and common PDMS were evaluated. Furthermore, to extend applications of film mold, micro-nano mixed structure was fabricated in film mold as we reported [3]. Finally, the film mold was applied to the roll-to-roll (R2R) UV nanoimprinting process, because high throughput is essential to achieve the mass production.
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.29.53