Determination of the Interface Roughness between Ni-Coated Layer and Cu Substrate by Glow Discharge Optical Emission Spectroscopy Depth Profiling

The depth profiles of Ni-coated copper substrates polished by different mesh size sandpapers were measured by the glow discharge optical emission spectroscopy (GDOES) depth profiling technique. The measured depth profiles were well fitted by the MRI-CRAS model developed recently on the basis of the...

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Veröffentlicht in:Advanced Materials Research 2015-03, Vol.1094, p.181-187
Hauptverfasser: Lin, Wei Xuan, Liu, Yi, Ye, Wei Bing, Wang, Jiang Yong, Li, Huan Sheng, Li, Jiong, Yu, Wei Hua
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Sprache:eng
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Zusammenfassung:The depth profiles of Ni-coated copper substrates polished by different mesh size sandpapers were measured by the glow discharge optical emission spectroscopy (GDOES) depth profiling technique. The measured depth profiles were well fitted by the MRI-CRAS model developed recently on the basis of the Mixing-Roughness-Information depth (MRI) model and the CRAter-Simulation (CRAS) model, taking into account the pronounced crater effect upon GDOES depth profiling. The crater effect upon depth profiling was characterized quantitatively and the interface roughness values between the coated Ni layer and the Cu substrates were determined and compared with the ones measured by AFM.
ISSN:1022-6680
1662-8985
1662-8985
DOI:10.4028/www.scientific.net/AMR.1094.181