Measuring the Thickness of Flakes of Hexagonal Boron Nitride Using the Change in Zero-Contrast Wavelength of Optical Contrast

Using the reflectivity mode of an optical microscope, we analyzed the optical contrast to identify the layer number of flakes of hexagonal boron nitride on a $SiO_2$ /Si substrate. Overall optical contrast in the visible range varies with the thickness of flakes. However, the wavelength of zero cont...

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Veröffentlicht in:Journal of the Optical Society of Korea 2015-10, Vol.19 (5), p.503-507
Hauptverfasser: Kim, Dong Hyun, Kim, Sung-Jo, Yu, Jeong-Seon, Kim, Jong-Hyun
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Sprache:eng
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Zusammenfassung:Using the reflectivity mode of an optical microscope, we analyzed the optical contrast to identify the layer number of flakes of hexagonal boron nitride on a $SiO_2$ /Si substrate. Overall optical contrast in the visible range varies with the thickness of flakes. However, the wavelength of zero contrast exhibits a linear redshift of 0.53 nm per layer, independent of the $SiO_2$ thickness, and increases proportionally with $SiO_2$ thickness. Experiments show good agreement with calculations and the results of AFM measurements. These results show that this zero-contrast approach is more accurate and easier than the reflectivity-contrast approach using the overall optical contrast.
ISSN:1226-4776
2093-6885
DOI:10.3807/JOSK.2015.19.5.503