Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method

Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method

Polymer MLA is fabricated by used of the DMD-based maskless lithography method. The process flow is described in this paper. The obtained photoresist concave MLA, which is used as a pattern to fabricate PDMS convex MLA, and the resulted PDMS MLA are measured with 3D surface profiler based on scannin...

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Veröffentlicht in:Advanced Materials Research 2015-02, Vol.1091, p.71-76
Hauptverfasser: Kuang, Guo Wen, Cui, Xiao Feng, Gao, Yi Qing, Li, Feng, Xu, Guang Tao
Format: Artikel
Sprache:eng
Schlagworte:
Digital
Lithography
Mathematical analysis
Photoresists
Reflection
Scanning
Silicone resins
White light interferometry
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Zusammenfassung:Polymer MLA is fabricated by used of the DMD-based maskless lithography method. The process flow is described in this paper. The obtained photoresist concave MLA, which is used as a pattern to fabricate PDMS convex MLA, and the resulted PDMS MLA are measured with 3D surface profiler based on scanning white light interferometry. Besides, the transmission and reflection spectrum of PDMS film sample are also measured and used to calculate the refractive index of the PDMS film.
ISSN:1022-6680
1662-8985
1662-8985
DOI:10.4028/www.scientific.net/AMR.1091.71