Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

An interferometer-based metrological scanning probe microscope (SPM) is successfully integrated into our nanopositioning and nanomeasuring machine (NPM machine) for high-precision measurements with nanometre uncertainty over a range of 25 mm × 25 mm × 5 mm. Both devices were developed at the Institu...

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Veröffentlicht in:	Measurement science & technology 2014-04, Vol.25 (4), p.44006-7
Hauptverfasser:	Vorbringer-Dorozhovets, N, Goj, B, Machleidt, T, Franke, K-H, Hoffmann, M, Manske, E
Format:	Artikel
Sprache:	eng
Schlagworte:	AFM Automation Devices electromagnetic changer for SPM probes fiducial marks metrological scanning probe microscope Microscopy nanopositioning and nanomeasuring machine Nanostructure Scanning probe microscopes Tips Topography Wear
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