Nanoscale 2013

The accurate determination of the properties of micro- and nano-structures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. In most cases, especially at the nanometer range, knowledge of the dimensional properties of structures is the fundamental base, to which further physical properties are linked. Quantitative measurements presuppose reliable and stable instruments, suitable measurement procedures as well as calibration artifacts and methods.