Structural Engineering of Vacuum-ARC Multiperiod Coatings

Structural Engineering of Vacuum-ARC Multiperiod Coatings

The possibilities of structural engineering in multiperiod TiN/Ti, TiN/CrN, TiN/MoN and TiN/ZrN systems are presented. Three principal parameters determining the structural state and properties of the coatings are determined, i.e., the substrate potential during the deposition, the thickness of laye...

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Veröffentlicht in:Metal science and heat treatment 2016-05, Vol.58 (1-2), p.37-39
Hauptverfasser: Sobol’, O. V., Andreev, A. A., Gorban’, V. F.
Format: Artikel
Sprache:eng
Schlagworte:
Barometric pressure
Characterization and Evaluation of Materials
Chemistry and Materials Science
Classical Mechanics
Coatings
Deposition
Engineering Thermodynamics
Heat and Mass Transfer
Heat treatment
Materials Science
Mechanical properties
Metallic Materials
Structural engineering
Thickness
Titanium
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Zusammenfassung:The possibilities of structural engineering in multiperiod TiN/Ti, TiN/CrN, TiN/MoN and TiN/ZrN systems are presented. Three principal parameters determining the structural state and properties of the coatings are determined, i.e., the substrate potential during the deposition, the thickness of layers in a period, and the pressure of the working atmosphere. The results of the study are used to develop deposition modes providing high mechanical properties in the coatings.
ISSN:0026-0673
1573-8973
DOI:10.1007/s11041-016-9961-3