Intrinsically Stretchable Biphasic (Solid-Liquid) Thin Metal Films

Intrinsically Stretchable Biphasic (Solid-Liquid) Thin Metal Films

Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography‐compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq−1) and large stretchability (400%). This novel approach to deposit and...

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Veröffentlicht in:Advanced materials (Weinheim) 2016-06, Vol.28 (22), p.4507-4512
Hauptverfasser: Hirsch, Arthur, Michaud, Hadrien O., Gerratt, Aaron P., de Mulatier, Séverine, Lacour, Stéphanie P.
Format: Artikel
Sprache:eng
Schlagworte:
Actuators
Circuits
Conductors
elasticity
elastomers
electrical conductivity
Electrical resistivity
Gallium
liquid metals
Metal films
Photolithography
Physical vapor deposition
thin metal films
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Zusammenfassung:Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography‐compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq−1) and large stretchability (400%). This novel approach to deposit and pattern liquid metals enables extremely robust, multilayer and soft circuits, sensors, and actuators.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201506234