Construction of a Simple Metal Evaporator Mounted on a Conflat Flange with an Outer Diameter of 70 mm

We have constructed a simple metal evaporator mounted on a conflat flange with an outer diameter of 70 mm. It consists of a tungsten filament, an alumina tube, two molybdenum electrodes, tantalum foils, and electric feedthroughs. Evaporation rates are measured as a function of electric current. We u...

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Veröffentlicht in:	Journal of the Vacuum Society of Japan 2016, Vol.59(5), pp.138-140
Hauptverfasser:	TANAKA, Masato, KODAMA, Hiraku, HIRAGA, Kenta, SHOHATA, Nariaki, TAKANO, Yusaku, YANASE, Kotaro, KIKUCHI, Takashi, MASE, Kazuhiko
Format:	Artikel
Sprache:	jpn
Schlagworte:	Aluminum oxide Construction Electrodes Evaporation Flanges Foils Thin films Tubes
Online-Zugang:	Volltext
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