Construction of a Simple Metal Evaporator Mounted on a Conflat Flange with an Outer Diameter of 70 mm

Construction of a Simple Metal Evaporator Mounted on a Conflat Flange with an Outer Diameter of 70 mm

We have constructed a simple metal evaporator mounted on a conflat flange with an outer diameter of 70 mm. It consists of a tungsten filament, an alumina tube, two molybdenum electrodes, tantalum foils, and electric feedthroughs. Evaporation rates are measured as a function of electric current. We u...

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Veröffentlicht in:Journal of the Vacuum Society of Japan 2016, Vol.59(5), pp.138-140
Hauptverfasser: TANAKA, Masato, KODAMA, Hiraku, HIRAGA, Kenta, SHOHATA, Nariaki, TAKANO, Yusaku, YANASE, Kotaro, KIKUCHI, Takashi, MASE, Kazuhiko
Format: Artikel
Sprache:jpn
Schlagworte:
Aluminum oxide
Construction
Electrodes
Evaporation
Flanges
Foils
Thin films
Tubes
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Zusammenfassung:We have constructed a simple metal evaporator mounted on a conflat flange with an outer diameter of 70 mm. It consists of a tungsten filament, an alumina tube, two molybdenum electrodes, tantalum foils, and electric feedthroughs. Evaporation rates are measured as a function of electric current. We used it to prepare an Au thin film and a Si (111)-√3 ×√3 R30°-Au surface.
ISSN:1882-2398
1882-4749
DOI:10.3131/jvsj2.59.138