New method for thickness determination and microscopic imaging of graphene-like two-dimensional materials

We employed the microscopic reflectance difference spectroscopy (micro-RDS) to determine the layer- number and microscopically image the surface topography of graphene and MoS2 samples. The contrast image shows the efficiency and reliability of this new clipping technique. As a low-cost, quantifiabl...

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Veröffentlicht in:Journal of semiconductors 2016, Vol.37 (1), p.16-20
Hauptverfasser: Qin, Xudong, Chen, Yonghai, Liu, Yu, Zhu, Laipan, Li, Yuan, Wu, Qing, Huang, Wei
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Sprache:eng
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Zusammenfassung:We employed the microscopic reflectance difference spectroscopy (micro-RDS) to determine the layer- number and microscopically image the surface topography of graphene and MoS2 samples. The contrast image shows the efficiency and reliability of this new clipping technique. As a low-cost, quantifiable, no-contact and non-destructive method, it is not concerned with the characteristic signal of certain materials and can be applied to arbitrary substrates. Therefore it is a perfect candidate for characterizing the thickness of graphene-like two- dimensional materials.
ISSN:1674-4926
DOI:10.1088/1674-4926/37/1/013002