Solution-processed conformal coating of ferroelectric polymer film and its application to multi-bit memory device
Ferroelectric multi-bit storage memory which is fabricated by means of the patterning and double-coating of ferroelectric polymer film is demonstrated. The multi-bit memory device demonstrated here has two thicknesses in a capacitor. Therefore, ferroelectric switching at each thickness arises in dif...
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Veröffentlicht in: | Microelectronic engineering 2016-07, Vol.160, p.68-72 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Ferroelectric multi-bit storage memory which is fabricated by means of the patterning and double-coating of ferroelectric polymer film is demonstrated. The multi-bit memory device demonstrated here has two thicknesses in a capacitor. Therefore, ferroelectric switching at each thickness arises in different voltage range. The structured capacitor with two different thicknesses is realized by optimizing two processes, i.e., the photo-lithographical patterning of the ferroelectric film and a double-coating method for the formation of the multilayer structure. Not only photo-lithographical patterning but also the double-coating method of ferroelectric film was performed with a solubility-controlled ferroelectric polymer solution created by the addition of an insoluble solvent. From electrostatic force microscopy and displacement-voltage measurements, the fabricated multi-bit storage memory operated as predicted for a multi-bit memory scheme. The solubility-controlling method suggested here will offer additional promising routes to fabricate complex organic devices based on a solution process.
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•A ferroelectric multi-bit memory device with two thicknesses was fabricated.•Two thicknesses were realized by spin-coating of solubility-controlled solution.•EFM and polarization-voltage curves show 4 states and low-voltage operation. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2016.03.037 |