TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 degree C

A detailed transmission electron microscopy analysis of LGS and CTGS substrates which are covered with RuAl thin films is performed after annealing the system at 600 and 800 degree C for 10 h under high vacuum conditions. Energy dispersive X-ray spectroscopy is applied to reveal the changes of the chemical composition of the substrates as well as of the metallization. While after annealing at 600 degree C hardly any changes occur in the films and in the substrate, huge inhomogeneities are found within the substrates after annealing at 800 degree C and a strong oxidation occurs within the RuAl films.