Advances in Nanoimprint Lithography

Advances in Nanoimprint Lithography

Nanoimprint lithography (NIL), a molding process, can replicate features

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Bibliographische Detailangaben
Veröffentlicht in:Annual review of chemical and biomolecular engineering 2016-06, Vol.7 (1), p.583-604
Hauptverfasser: Traub, Matthew C, Longsine, Whitney, Truskett, Van N
Format: Artikel
Sprache:eng
Schlagworte:
Availability
Biotechnology
Industrial development
Integrated circuits
J-FIL
Jet and Flash Imprint Lithography
Lithography
Molecular Imprinting
nanofabrication
Nanostructures - chemistry
Nanotechnology
Optics and Photonics
Photolithography
Semiconductors
Surface Properties
Temperature
thermal NIL
Tissue Engineering
Ultraviolet Rays
UV-curable nanoimprint lithography
UV-NIL
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Beschreibung
Zusammenfassung:Nanoimprint lithography (NIL), a molding process, can replicate features
ISSN:1947-5438
1947-5446
DOI:10.1146/annurev-chembioeng-080615-034635