Chemical Characterization of DC-Sputtered In2O3 Films with a Top SnO2 Layer
In2O3 thin films with a top layer of SnO2 were deposited onto glass substrates by DC reactive-magnetron sputtering. After deposition, In2O3/SnO2 samples were annealed in vacuum at 400oC. Structural, optical, and chemical composition was investigated by X-ray diffraction, UV-Vis spectroscopy and XPS,...
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Veröffentlicht in: | Journal of nano research 2015-03, Vol.30, p.86-95 |
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Sprache: | eng |
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