Chemical Characterization of DC-Sputtered In2O3 Films with a Top SnO2 Layer

In2O3 thin films with a top layer of SnO2 were deposited onto glass substrates by DC reactive-magnetron sputtering. After deposition, In2O3/SnO2 samples were annealed in vacuum at 400oC. Structural, optical, and chemical composition was investigated by X-ray diffraction, UV-Vis spectroscopy and XPS,...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of nano research 2015-03, Vol.30, p.86-95
Hauptverfasser: Bedoya-Calle, Álvaro, Shaji, Sadasivan, Torres-Castro, Alejandro, García-Méndez, Manuel, Ortiz-Méndez, Ubaldo
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!