Characterization of laser transferred contact through aluminum oxide passivation layer

The point contact structure of the rear side of crystalline silicon solar cells is used to realize high passivation quality and good electrical contact. A conversion efficiency of 19.8% was achieved on the passivated emitter and rear cell (PERC) structure with a widegap heterojunction emitter. In this solar cell, laser-fired contact (LFC) process is used to make the point contacts. In the LFC process, laser irradiation damage to the surface of crystalline silicon was found to be the big issues for higher passivation quality. We investigated laser-transferred contact (LTC) process as a new contacts formation process. The LTC samples showed higher effective minority carrier lifetime and good contact resistivity compared with the LFC samples.