Magnetooptical and crystalline properties of sputtered garnet ferrite film using a stress relaxation buffer layer

The purpose of this study was to improve the optical characteristics of garnet ferrite films sputter-deposited on a glass substrate. The magnetooptical properties of the garnet ferrite film are strongly influenced by the thermal stress imposed on the substrate during crystallization. The condition of the interface between the garnet film and the substrate during the initial film deposition affects the magnetooptical characteristics of the entire film. In particular, we revealed the effect of stress generated at the interface on the crystallinity of the deposited garnet films with a stress relaxation buffer layer by observing the film cross section and the film surface. In addition, we qualitatively estimated of the effect of cracking in the garnet film on a glass substrate.