Integration of High-Frequency M-Type Hexagonal Ferrite Inductors in LTCC Multilayer Modules

Integration of High-Frequency M-Type Hexagonal Ferrite Inductors in LTCC Multilayer Modules

Monolithic hexagonal BaCo1,3Ti1,3Fe9,4O19 ferrite multilayers sintered at 900°C exhibit a fine‐grained microstructure with permeability of μ′ = 16 and a resonance frequency fr ≥ 1GHz. Co‐firing of hetero‐laminates of ferrite with CT700 glass–ceramic LTCC tapes and with polycrystalline zinc titanate...

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Veröffentlicht in:International journal of applied ceramic technology 2016-05, Vol.13 (3), p.540-548
Hauptverfasser: Bierlich, Silvia, Reimann, Timmy, Barth, Stefan, Capraro, Beate, Bartsch, Heike, Müller, Jens, Töpfer, Jörg
Format: Artikel
Sprache:eng
Schlagworte:
Alloys
Ceramics
Ferrite
Inductors
Laminates
Modules
Multilayers
Permeability
Zinc
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Zusammenfassung:Monolithic hexagonal BaCo1,3Ti1,3Fe9,4O19 ferrite multilayers sintered at 900°C exhibit a fine‐grained microstructure with permeability of μ′ = 16 and a resonance frequency fr ≥ 1GHz. Co‐firing of hetero‐laminates of ferrite with CT700 glass–ceramic LTCC tapes and with polycrystalline zinc titanate (ZT) LTCC tapes was studied. Co‐firing at 900°C of ferrite/CT700 leads to multilayers with cracks caused by substantial thermal expansion mismatch. Co‐fired ferrite/ZT multilayer laminates exhibit a permeability of μ′ = 16 and do not show any defects. Hexagonal ferrite multilayer inductor elements were integrated into ZT‐based multilayer LTCC modules and co‐fired at 900°C with Ag metallization.
ISSN:1546-542X
1744-7402
DOI:10.1111/ijac.12512