Quartz on Silicon

The integration of quartz with silicon may provide a route to fabricate advanced piezoelectric devices. [Also see Research Article by Carretero-Genevrier et al. ] The on-chip integration of piezoelectric quartz would be highly beneficial for chemical sensing and accurate timing circuits. However, to...

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Veröffentlicht in:Science (American Association for the Advancement of Science) 2013-05, Vol.340 (6134), p.818-819
Hauptverfasser: Brinker, C. Jeffrey, Clem, Paul G.
Format: Artikel
Sprache:eng
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Zusammenfassung:The integration of quartz with silicon may provide a route to fabricate advanced piezoelectric devices. [Also see Research Article by Carretero-Genevrier et al. ] The on-chip integration of piezoelectric quartz would be highly beneficial for chemical sensing and accurate timing circuits. However, to date, it has not been possible to achieve single-orientation, single-variant silicon dioxide films with high piezoelectric activity. On page 827 of this issue, Carretero-Genevrier et al. ( 1 ) demonstrate the formation of oriented piezoelectrically active α-quartz thin films directly on silicon. Although the growth mechanism and piezoelectric properties require fuller development, their approach may be an attractive route for developing integrated piezoelectric devices.
ISSN:0036-8075
1095-9203
DOI:10.1126/science.1236752