Quartz on Silicon
The integration of quartz with silicon may provide a route to fabricate advanced piezoelectric devices. [Also see Research Article by Carretero-Genevrier et al. ] The on-chip integration of piezoelectric quartz would be highly beneficial for chemical sensing and accurate timing circuits. However, to...
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Veröffentlicht in: | Science (American Association for the Advancement of Science) 2013-05, Vol.340 (6134), p.818-819 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The integration of quartz with silicon may provide a route to fabricate advanced piezoelectric devices.
[Also see Research Article by
Carretero-Genevrier
et al.
]
The on-chip integration of piezoelectric quartz would be highly beneficial for chemical sensing and accurate timing circuits. However, to date, it has not been possible to achieve single-orientation, single-variant silicon dioxide films with high piezoelectric activity. On page 827 of this issue, Carretero-Genevrier
et al.
(
1
) demonstrate the formation of oriented piezoelectrically active α-quartz thin films directly on silicon. Although the growth mechanism and piezoelectric properties require fuller development, their approach may be an attractive route for developing integrated piezoelectric devices. |
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ISSN: | 0036-8075 1095-9203 |
DOI: | 10.1126/science.1236752 |