Micro-patterns fabrication using focused proton beam lithography

Micro-patterns fabrication using focused proton beam lithography

Proton beam writing technique was recently introduced at 3MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0MeV and 2.6MeV protons micro-beam. Micro-channels (52μm×52μm...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2016-03, Vol.371, p.344-349
Hauptverfasser: Cutroneo, M., Havranek, V., Mackova, A., Semian, V., Torrisi, L., Calcagno, L.
Format: Artikel
Sprache:eng
Schlagworte:
Accelerators
Ion-micro-beam
Lithography
Microscopy
Nuclear physics
Pattern in PMMA
Polymethyl methacrylates
Proton beams
STIM analysis
Three dimensional
Walls
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Beschreibung
Zusammenfassung:Proton beam writing technique was recently introduced at 3MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0MeV and 2.6MeV protons micro-beam. Micro-channels (52μm×52μm) have been realized. After chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM).
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2015.10.006