Direct Growth of Graphene Films on 3D Grating Structural Quartz Substrates for High-Performance Pressure-Sensitive Sensors

Conformal graphene films have directly been synthesized on the surface of grating microstructured quartz substrates by a simple chemical vapor deposition process. The wonderful conformality and relatively high quality of the as-prepared graphene on the three-dimensional substrate have been verified...

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Veröffentlicht in:ACS applied materials & interfaces 2016-07, Vol.8 (26), p.16869-16875
Hauptverfasser: Song, Xuefen, Sun, Tai, Yang, Jun, Yu, Leyong, Wei, Dacheng, Fang, Liang, Lu, Bin, Du, Chunlei, Wei, Dapeng
Format: Artikel
Sprache:eng
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Zusammenfassung:Conformal graphene films have directly been synthesized on the surface of grating microstructured quartz substrates by a simple chemical vapor deposition process. The wonderful conformality and relatively high quality of the as-prepared graphene on the three-dimensional substrate have been verified by scanning electron microscopy and Raman spectra. This conformal graphene film possesses excellent electrical and optical properties with a sheet resistance of 80% (at 550 nm), which can be attached with a flat graphene film on a poly­(dimethylsiloxane) substrate, and then could work as a pressure-sensitive sensor. This device possesses a high-pressure sensitivity of −6.524 kPa–1 in a low-pressure range of 0–200 Pa. Meanwhile, this pressure-sensitive sensor exhibits super-reliability (≥5000 cycles) and an ultrafast response time (≤4 ms). Owing to these features, this pressure-sensitive sensor based on 3D conformal graphene is adequately introduced to test wind pressure, expressing higher accuracy and a lower background noise level than a market anemometer.
ISSN:1944-8244
1944-8252
DOI:10.1021/acsami.6b04526