Studies on effect of oxygen flow rate in textured grain growth of ZnO thin films

Studies on effect of oxygen flow rate in textured grain growth of ZnO thin films

ZnO thin films were deposited on glass substrate by Successive Ionic Layer Adsorption Reaction (SILAR) method. Effect of oxygen flow rate in textured grain growth, resistance and band gap of the thin films have been done. Textured grain growth of the samples were measured by comparing the peak inten...

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2015-01, Vol.73 (1), p.12105
Hauptverfasser: Thomas, Deepu, Vattappalam, Sunil C, Mathew, Sunny, Augustine, Simon
Format: Artikel
Sprache:eng
Schlagworte:
Adsorption
Deposition
Energy gap
Flow rate
Flow velocity
Glass
Glass substrates
Grain growth
Materials science
Oxygen
Thin films
Zinc oxide
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Zusammenfassung:ZnO thin films were deposited on glass substrate by Successive Ionic Layer Adsorption Reaction (SILAR) method. Effect of oxygen flow rate in textured grain growth, resistance and band gap of the thin films have been done. Textured grain growth of the samples were measured by comparing the peak intensities from XRD. Textured grain growth was found to be maximum when the oxygen flow rate is 2.5 litre/minute. It is found that as the oxygen flow rate increases above this limit, textured grain growth decreases and resistance the samples increases. The optical band gap of ZnO film was found to be increased with the increase of oxygen flow rate.
ISSN:1757-899X
1757-8981
1757-899X
DOI:10.1088/1757-899X/73/1/012105