Degradation of Polymers for Resist Using Microbubbles on Ozonized Water

Degradation of Polymers for Resist Using Microbubbles on Ozonized Water

A significant effect of microbubbles on degradation of novolak resin could not be confirmed. Microbubbles efficiently dissolved ozone in solution, enhancing dissolved ozone concentration. By using ozone microbubbles, removal rate of novolak resin was enhanced. We expect that the effect of polymer de...

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Veröffentlicht in:Journal of Photopolymer Science and Technology 2015/05/11, Vol.28(2), pp.299-301
Hauptverfasser: Matsuura, Kohei, Nishiyama, Takashi, Sato, Eriko, Yamamoto, Masashi, Takahashi, Masayoshi, Koike, Kunihiko, Horibe, Hideo
Format: Artikel
Sprache:eng
Schlagworte:
Degradation
Dissolution
environmental
microbubble
Ozone
Photopolymers
photoresist
Polymers
removal
Resins
Resists
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Zusammenfassung:A significant effect of microbubbles on degradation of novolak resin could not be confirmed. Microbubbles efficiently dissolved ozone in solution, enhancing dissolved ozone concentration. By using ozone microbubbles, removal rate of novolak resin was enhanced. We expect that the effect of polymer degradation by microbubbles would be made more obvious by setting suitable conditions such as pH, ionic strength, and removal process.
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.28.299