Nanothermoforming of hierarchical optical components utilizing shape memory polymers as active molds

We utilize shape memory polymers as active mold inserts for the thermoforming of complex, hierarchical nano- and microstructured optical components with undercuts on large scales. Our approach combines nanoimprint/hot embossing and thermoforming with the unique features of shape memory polymers. As examples for this nano- and microthermo-forming process, we demonstrate the fabrication of hierarchical photonic structures inspired by the blue Morpho butterfly as well as diffractive optical elements with nm-and mu m-size structures.